1. Teknụzụ Micromachining anụ ahụ
Laser Beam Machining: Usoro nke na-eji ike ọkụ na-eduzi laser beam iji wepụ ihe sitere na metal ma ọ bụ nke na-abụghị ọla, nke dabara adaba maka ihe ndị na-agbaji agbaji nwere obere ọkụ eletrik, mana enwere ike iji ya mee ihe maka ọtụtụ ihe.
Nhazi ion beam: ihe dị mkpa na-emepụta ihe na-adịghị mma maka ịmepụta micro / nano. Ọ na-eji mgbaba ion agbagoro n'ime oghere oghere iji wepụ, gbakwunye ma ọ bụ gbanwee atom n'elu ihe.
2. Chemical micromachining technology
Reactive Ion Etching (RIE): bụ usoro plasma nke ụdị na-enwe obi ụtọ site na mwepu ugboro redio iji tinye mkpụrụ ma ọ bụ ihe nkiri dị mkpa n'ime ọnụ ụlọ nrụgide dị ala. Ọ bụ usoro synergistic nke ụdị ndị na-arụ ọrụ nke kemịkalụ na bombu nke ion ike dị elu.
Electrochemical Machining (ECM): Ụzọ nke iwepu ọla site na usoro electrochemical. A na-ejikarị ya emepụta machining machining nke ihe siri ike ma ọ bụ ihe siri ike iji usoro eji eme ya. Ojiji ya bụ naanị na ihe ndị na-eduzi ya. ECM nwere ike ibelata akụkụ dị nta ma ọ bụ profaịlụ, akụkụ mgbagwoju anya ma ọ bụ oghere n'ime ọla siri ike na nke na-adịghị ahụkebe.
3. Mechanical micromachining technology
Ntụgharị diamond:Usoro nke ịtụgharị ma ọ bụ na-arụ ọrụ nkenke nke ọma site na iji lathes ma ọ bụ igwe ewepụtara nwere ndụmọdụ diamond eke ma ọ bụ sịntetik.
Igwe ihe eji eme diamond:Usoro ịkpụ nke enwere ike iji mepụta oghere oghere aspheric site na iji ngwaọrụ diamond gburugburu site na usoro ịkpụ mgbanaka.
Echicha nke ọma:Usoro abrasive nke na-enye ohere ka arụ ọrụ na-arụ ọrụ ka ọ rụọ ọrụ nke ọma na njedebe dị nso na 0.0001 ″ ndidi.
Nchacha:Usoro abrasive, argon ion beam polishing bụ usoro kwụsiri ike maka imecha enyo teliskop yana mezie mperi ndị fọdụrụ site na nchacha igwe ma ọ bụ optics na-atụgharị diamond, usoro MRF bụ usoro nchacha nke mbụ. Azụmahịa ma jiri ya mepụta oghere aspherical, enyo, wdg.
3. Teknụzụ micromachining laser, dị ike karịa echiche gị
Oghere ndị a na ngwaahịa ahụ nwere njirimara nke obere nha, ọnụ ọgụgụ buru ibu, na nhazi nhazi dị elu. Site na ike ya dị elu, ezigbo ntụziaka na ịdị n'otu, teknụzụ micromachining laser nwere ike ilekwasị anya n'ọkụ laser n'ime microns ole na ole na dayameta site na usoro ngwa anya. Ebe ọkụ ahụ nwere oke njupụta nke ike ike. Ngwa ahụ ga-eru ngwa ngwa na-agbaze ma gbazee n'ime agbaze. Na-aga n'ihu na-arụ ọrụ nke laser, agbaze ahụ ga-amalite ịmị ọkụ, na-eme ka ikuku vapo dị mma, na-eme ka ọnọdụ ebe ikuku, siri ike na mmiri mmiri na-ebikọ ọnụ.
N'ime oge a, n'ihi mmetụta nke nrụgide uzuoku, a ga-agbaze agbaze na-akpaghị aka, na-emepụta ọdịdị mbụ nke oghere ahụ. Ka oge irradiation nke eriri laser na-abawanye, omimi na dayameta nke microspores na-aga n'ihu na-abawanye ruo mgbe a kwụsịrị irradiation laser kpamkpam, na agbaze nke a na-efesabeghị ga-esiwanye ike ịmepụta oyi akwa recast, ka o wee nweta ya. ọkụ laser na-enweghị nhazi.
Site n'ịbawanye ụbara maka micromachining nke ngwaahịa ndị dị elu na ngwa ngwa n'ahịa, yana mmepe nke teknụzụ micromachining laser na-etowanye nke ọma, teknụzụ micromachining laser na-adabere na uru nhazi ya dị elu, arụmọrụ nhazi dị elu na ihe eji eme ihe. Uru nke obere mmachi, enweghị mmebi anụ ahụ, na njikwa ọgụgụ isi na nke na-agbanwe agbanwe ga-abụ nke a na-ejikarị eme ihe na nhazi nke ngwaahịa dị elu na ọkaibe.
Oge nzipu: Sep-26-2022